Silicon boats for vertical furnaces are precision-engineered carriers designed to hold silicon wafers or substrates securely during high-temperature processing steps such as diffusion, oxidation, and annealing within vertical furnace systems.

Manufactured from high-purity silicon or silicon-based materials, these boats offer excellent thermal conductivity and stability, ensuring uniform heat distribution and minimal thermal stress. Their robust construction resists deformation and contamination, maintaining precise wafer spacing to optimize gas flow and process uniformity.