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Quartz Boat

product details

The 8 inch semiconductor quartz wafer carrier is engineered to safely hold and transport 200 mm wafers through critical high-temperature semiconductor processes, including oxidation, diffusion, and LPCVD. Made from ultra-high-purity fused quartz, it provides excellent thermal shock resistance, low impurity levels, and compatibility with cleanroom environments.

Its precise slot geometry and stable structure ensure uniform wafer spacing, minimizing particle generation, mechanical stress, and thermal distortion during processing. The carrier supports optimized gas flow and heat distribution, producing high yield and repeatable results across all wafers. Designed for integration with vertical and horizontal furnace systems, this quartz wafer carrier is a key component for reliable, contamination-free wafer handling in advanced semiconductor manufacturing.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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