The 6 inch fused silica cage boat is an advanced wafer support solution crafted from ultra-high purity fused silica, engineered for use in high-temperature semiconductor manufacturing environments. Designed with a rigid open-frame "cage" structure, this boat offers optimal support and precise alignment for 6-inch silicon wafers while promoting superior gas flow and thermal uniformity during processes such as oxidation, diffusion, LPCVD, and annealing.

Fused silica offers distinct advantages over standard quartz, including lower thermal expansion, higher thermal shock resistance, and improved dimensional stability at elevated temperatures. These properties ensure that the cage boat maintains its integrity over repeated thermal cycles, minimizing wafer contamination, deformation, and process variability.